Abstract
The large variety of the technologies and physical, chemical or biochemical effects united in micro systems requires a new generation of quality assurance. An appropriate quality management should check all conceivable influences on the product and perform a complete tolerance synthesis based on its function and with regard to manufacturing and cost optimization. In the following a new approach to function-oriented tolerance analysis and synthesis is presented. The authors have developed a computer program which assists Design Engineers in tolerance analysis and synthesis in micro technology. This contribution presents the theoretical background and the basic functionality of this software. For a better understanding a short MEMS example is shown.
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