Abstract
We present a highly computationally efficient way to simulate the deformation of a polymeric layer when embossed with an arbitrarily patterned stamp. Two simplified material models are considered: a purely elastic model, which is useful when the material is in a rubbery regime, and a visco-elastic model, which has more general applicability. The simulation approach has been shown to represent the feature size-dependent penetration of a polymethylmethacrylate (PMMA) layer into stamp cavities with widths varying between 5 and 90μm. The time-dependence of cavity penetration has also been approximately modelled in the case of PMMA embossed at 110°C under an average pressure of 8MPa for up to 10min.
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