Abstract
Radiofrequency discharges can generate non-equilibrium and stable micro-plasmas without a streamer in micro-hollow cathode reactors. In this work, we present the results of a fluid model describing the mechanisms occurring in a micro-reactor in argon plasma, generated by an excitation of 13.56 MHz at high pressures (100 Torr) with and without a secondary emission of electrons. The results of the simulation improve the understanding of the effect of micro-hollow cathodes and of the influence of excited atoms in ionization and sustainment of argon discharge at low voltage (150 V). Simulation results showed that the maximum of penning ionization and stepwise ionization rates are respectively about 25% and 11% of the maximum of direct ionization rate. The metastable atom density reaches a maximum value of 1020/m3 inside the hole and have also two humps near to oppsite cathodes. Accordingly the excitation rate is significant in all the space.
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