Abstract
In the last years the challenging problem for plasma science and technology started to be the surface treatment at higher pressures including the atmospheric pressure plasma. Knowledge of processes near the substrate is very important, but the possibilities of their diagnostics are limited in this pressure range. In the contribution the combination of molecular dynamics and Monte Carlo methods was used for the study of trajectories of charged particles in the sheath and presheath at low and medium pressures. The results of our simulations were compared with experimental data obtained in dc glow discharge in argon. In the discussion an attention is devoted both to the influence of gas pressure on plasma characteristics and to the technique of computer modelling at higher pressures.
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