Computational Modeling of Silicon Nanoparticle Synthesis: I. A General Two-Dimensional Model

Abstract

A two-dimensional model has been developed for silicon nanoparticle synthesis by silane thermal decomposition driven by laser heating in a tubular reactor. This fully coupled model includes fluid dynamics, laser heating, gas phase and surface phase chemical reactions, and aerosol dynamics which includes particle transport and evolution by convection, diffusion, thermophoresis, nucleation, surface growth, and coagulation processes. A moment method, based upon a lognormal particle size distribution, and a sectional method are used to model the aerosol dynamics. The simulation results obtained by the two methods are compared. The sectional method is capable of capturing the bimodal behavior that occurs locally during the process, while the moment method is computationally more efficient. The effect of operating parameters, such as precursor concentration, gas phase composition, inlet gas velocity and laser power input, on the characteristics of the particles produced are investigated. Higher temperature gene...