Abstract
The microwave planar cutoff probe, recently proposed by Kim et al. is designed to measure the cutoff frequency in a transmission (S21) spectrum. For real-time electron density measurement in plasma processing, three different types have been demonstrated: point-type, ring-type (RCP), and bar-type (BCP) planar cutoff probes. While Yeom et al. has shown that the RCP and BCP are more suitable than the point-type probe for process monitoring, the basic characteristics of the ring- and bar-type probes have yet to be investigated. The current work includes a computational characterization of a RCP and BCP with various geometrical parameters, as well as a plasma parameter, through a commercial three-dimensional electromagnetic simulation. The parameters of interest include antenna size, antenna distance, dielectric thickness of the transmission line, and input electron density. Simulation results showed that the RCP has several resonance frequencies originating from standing-wave resonance in the S21 spectrum that the BCP does not. Moreover, the S21 signal level increased with antenna size and dielectric thickness but decreased with antenna distance. Among the investigated parameters, antenna distance was found to be the most important parameter to improve the accuracy of both RCP and BCP.
Highlights
Consisting of charged particles and neutral particles, plasma is controllable via electrostatic and electromagnetic fields [1].Its application covers various fields such as material fabrication, nuclear fusion, and medical, environmental, and aerospace industries [1,2]
For simple understanding, visualizations of the antenna configurations in the ring-type planar cutoff probe (RCP) and bar-type planar cutoff probe (BCP) are provided for each condition
This paper investigated the basic properties of two types of planar cutoff probes, the ring-type paper planar investigated basic with properties of geometrical two types of parameters planar cutoffasprobes, ring-type and theThis bar-type cutoff the probes, various well asthe a plasma and the bar-type planar cutoff probes, with various geometrical parameters as well as a plasma parameter through a commercial 3D electromagnetic simulation
Summary
Consisting of charged particles (electrons and ions) and neutral particles (atoms, molecules, radicals, excited and metastable species), plasma is controllable via electrostatic and electromagnetic fields [1]. Kim et al developed the first planar cutoff probe, which measures the cutoff frequency in a transmission microwave frequency spectrum (S21 ), analyzed the basic characteristics of the point-type probe, and optimized it via CST Microwave Studio [18]. They fabricated the probe and firstly demonstrated its operation.
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