Abstract

The computational analysis of the plasma source with the hollow anode is performed using the two-dimensional Particle-in-Cell Monte Carlo collisions model. This source operates in two molecular gases (CO2 and N2) in the abnormal glow mode, i.e., it is supported by the secondary electron emission from the cathode. It is obtained that this plasma source can be used for the generation of high-energy electrons (energy > 100 eV) only if the cathode potential exceeds 500 V. Otherwise, the high-energy electrons generated in the high-voltage cathode sheath dissipate almost all their energy in the plasma column and get thermalized.

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