Abstract

Two-dimensional computational analysis of lateral overgrowth of GaAs by liquid-phase epitaxy has been carried out. The evolution of the growth interfaces is obtained by using growth velocity calculated from solute concentration field in the vicinity of the growth layer. Effects of interface kinetics and crystal surface tension (Gibbs–Thomson effect) were taken into account. The shapes of grown epilayers are in good agreement with experimental observations. The comparison of numerical results under different growth conditions demonstrates the importance of interface kinetics and Gibbs–Thomson effects on shape and aspect ratio of epitaxial laterally overgrown (ELO) layers.

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