Computation of capacitance matrix for integrated circuit interconnects using semi-analytic Green's function method

Abstract

In this paper a method for computing the capacitance matrix of a multiconductor interconnect line in a multilayered dielectric region is presented. The number of conductors and dielectric layers are arbitrary. The conductors are infinitesimally thin, and can be placed anywhere in the structure. The formulation is obtained by using a semi-analytic Green's function for multilayer structures, which is integrated to a series expansion, valid for uniform charge distribution on the conductors. In addition, the quasi-analytical evaluation of the entries of the Galerkin matrix leads to a very efficient and accurate computer code. Computed results are given for some cases of the integrated circuit interconnects to show the advantages and simplicity of our procedure as compared to the methods available in the literature.