Abstract
When radio frequency micro-electromechanical switch is closed position, it provides very small insertion loss, and in opened position, it provides superior isolation. RF MEMS switch is presented for low actuation voltage and stress computation. The flexures and multiple perforation is used to reduce actuation voltages due to this the spring constant is also reduces. The stress is calculated by simulating slender micro-membrane which is made up of hafnium oxide material. The RF MEMS switch is designed with supporting of various types of flexures which provides different displacement and capacitance. The RF MEMS switch is designed Fixed Fixed beam with supported of various types of meanders or flexures.
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