Abstract
A set of three-dimensional models has been developed for dc glow discharges in argon. A combination of Monte Carlo, fluid and collisional-radiative models is used to describe the various species present in the glow discharge plasma, i.e. argon atoms in the ground state and in various excited levels, fast argon atoms, argon ions, electrons, sputtered copper atoms and the corresponding copper ions, both in the ground state and in various excited levels. Typical results of the models are current-voltage-pressure characteristics, the densities, energies and fluxes of the various plasma species, the potential and electric field distribution, information about collision processes in the plasma and about sputtering at the cathode, optical emission intensities etc. These results are compared with experimental data as much as possible, in order to check the validity of the models. The satisfactory agreement shows that the models present already a realistic picture of the glow discharge.
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