Abstract
Compositionally step-varied (Pb, Ca)TiO3 thin films were prepared on platinum-coated silicon substrates by a monoethanolamine-modified sol-gel technique. The dielectric constant and dissipation factor were found to be 342 and 0.019, respectively, for thin films of 0.6μm in thickness annealed at 550 °C for 60 min. The remanent polarization and coercive field were 37.7 μC/cm2 and 60.4 kV/cm, respectively. The leakage current was 1.31×10−7 A/cm2 at the voltage of 5 V. The compositionally step-varied (Pb, Ca)TiO3 thin films had enhanced dielectric and ferroelectric properties which were suitable for various device applications.
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