Compositional Mapping with the Electron Probe Microanalyzer: Part I

Abstract

Compositional mapping with the electron probe microanalyzer is a technique for creating digital images, using the localized concentration of an element of compound to specify the color scale or intensity for display of the image. All of the steps in conventional single-location electron probe microanalysis are used in compositional mapping. In addition, various correction methods are used to remove artifacts that arise during scanning. With all corrections applied, quantitative mapping to trace levels of 100 ppm has been demonstrated in the most favorable cases and mapping at 1,000 ppm can be achieved in most instances. The authors discuss the correction techniques used for both wavelength- and energy-dispersive spectrometries. A discussion is included of the problems that spurred the development of compositional mapping as a quantitative technique, the general procedure involved, and the correction techniques applied to the mapping of major constituents.