Abstract
A series of soft magnetic nanogranular FeCo-TiO2 films with different compositions of FeCo were fabricated on Si substrates by co-sputtering FeCo and TiO2, and the magnetic and high frequency properties were studied in details. X-ray diffraction analysis confirmed that the films were nanocrystalline/amorphous composites. A high saturation magnetization of 14 kGs, a low coercivity of 5.3 Oe, a FMR frequency of 3.2 GHz, and a high resistivity of 1068 μΩ cm were obtained when the volume fraction of FeCo was 0.68. The excellence electromagnetic properties make the films an excellent candidate for microwave applications.
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