Abstract
Rutherford backscattering (RBS) and secondary-ion mass spectrometry techniques have been used to investigate the two-step process involved during waveguide fabrication in LiNbO3 using Zn-vapour diffusion. Compositional analysis (O, Nb, Li and Zn) in the two steps has been characterised. RBS analysis reveals that the first step, involving a heating of the substrate under a metallic Zn atmosphere, gives rise to a partial exchange between the Nb and Li ions from the crystals and the Zn from the vapour source. The second treatment at higher temperature in an open atmosphere diffuses the Zn deeper into the substrate, thus forming an optical waveguide, while the Nb and Li ions recover their bulk values.
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