Abstract
NdFeB films were prepared by RF-sputtering and subsequent thermal annealing. Both structure and magnetic properties are sensitive to the film composition. The Nd 23Fe 70B 7 film shows perpendicular magnetic anisotropy whereas the Nd 31Fe 60B 9 film is magnetically isotropic, which is consistent with anisotropic and isotropic c-axis alignment of Nd 2Fe 14B crystallites in respective films. The films show high coercivity of 15 and 20 kOe, respectively.
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