Abstract
AbstractOxide thickness and composition averaged over a few square millimeter have been measured with nm thickness resolution by diffuse reflectance Fourier transform infrared (FTIR) spectroscopy. μ-Raman spectroscopy has been done on powders and bulk samples in the past, and can now be done on surfaces layers with μm lateral and depth resolution using con-focal microscopy. Here we apply con-focal-microscopy-based μ -Raman spectroscopy to a freshly polished/lightly oxidized and to heavily oxidized uranium to determine its sensitivity. The spectra show that μ-Raman spectroscopy does detect oxide thickness and oxide composition with high sensitivity.
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