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Abstract
Nuclear elastic scattering of 12 MeV protons was employed for the first time to study the composition of thin films of hydrogenated amorphous Si-Ge alloys. The concentrations of H, Si, and Ge were measured simultaneously. The detection limit is about 25 ppm for a 10-min run. Free-standing films or films on a flat substrate with a total thickness of up to 20 μm can be analyzed.
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