Abstract

Lead-free piezoelectric (1 − x)(Bi, Na)TiO3–xBaTiO3 (x = 0.06–1.0) thin films were deposited, and their crystal structures, ferroelectricity, and piezoelectric properties were studied. These films were epitaxially grown on SrRuO3 covered (100) SrTiO3 substrates by pulsed laser deposition using ceramic targets. For all the compositions, the tetragonal films were found to be grown with (001), polar-axis orientation, mainly due to the thermal strain caused by the different thermal expansion coefficients between the substrate and films. Tetragonal films with x = 0.3 and 0.5 showed higher tetragonality, c/a ratio, than the reported values for the bulk ceramics due to the clamp of the in-plane a-axis by underlying SrRuO3 lattice. Here, a and c are the lattice parameters along in-plane and out-of-plane directions, respectively. This larger c/a ratio results in higher Curie temperature. It was revealed that remanent polarization and coercive electric field correlate with the increase in the c/a ratio of the films. The film with x = 0.06 exhibits the maximum piezoelectric property.

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