Abstract

A new composition control method of molecular beam epitaxy is studied in AlxGa1-xAs using a pulsed molecular beam. The AlAs mole ratio in the ternary compound is controlled by changing the duty ratio of a pulsed aluminum molecular beam. The photoluminescence shows no particular difference between the films grown by the pulsed molecular beam and a conventional-continuous molecular beam. A composition control system is made and a new type of superlattice is fabricated.

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