Abstract
The composition and mechanical stresses in Si1−xGex nanoislands involved in multilayer and single-layer structures grown under the same conditions are determined using Raman spectroscopy. It is demonstrated that an increase in the content of silicon in the nanoislands contained in a multilayer structure does not enhance their relaxation (as compared to that in a single layer) due to the absence of a free surface. The experimental scattering spectrum of folded acoustic phonons contains bands with sufficiently small half-widths, which indicates high quality of the grown superlattices with nanoislands.
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