Abstract
The TiOX thin films were grown on the glass substrate for the low-e film applications by direct-current magnetron sputtering methods. The composite nature of dielectric and metallic phases including Ti2O3, TiO2 and amorphous TiOx were identified from the comparative study of x-ray diffraction and Raman spectroscopy. The coalescent nanocolumnar structure revealed from scanning electron microscopy is believed to be responsible for the absence of the interference in the transmission. Most interestingly, the narrow transmittance bands from the films were observed in the visible region, especially in the violet-blue-green color portion, which could be ideal for the applications of narrow band-pass filters or red/infrared reflectors.
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