Abstract
a-Si layers could serve as a low-cost precursor for fabricating a poly-Si absorber for photovoltaic cells. We prepared a-Si films onto glass substrates by RF-magnetron sputtering. The Ar-gas pressure was adjusted from 0.7 to 4.5 Pa to reach average rates (≳1.0nm/s), and increase manufacturing efficiency. We analyzed the structural and optical properties of the a-Si films using Raman and optical transmission spectroscopies. The Cody-Lorentz model was adopted to calculate their complex refractive index.
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