Compilation on Synthesis, Characterization and Properties of Silicon and Boron Carbonitride Films

Abstract

During the last years the interest in silicon and boron carbonitrides developed remarkably. This interest is mainly based on the extraordinary properties, expected from theoretical considerations. In this time significant improvements were made in the synthesis of silicon carbonitride SiCxNy and boron carbonitride BCxNy films by both physical and chemical methods. In the Si–C–N and B-C-N ternary systems a set of phases is situated, namely diamond, SiC, ┚-Si3N4, c-BN, B4C, and ┚-C3N4, which have important practical applications. SiCxNy has drawn considerable interest due to its excellent new properties in comparison with the Si3N4 and SiC binary phases. The silicon carbonitride coatings are of importance because they can potentially be used in wear and corrosion protection, high-temperature oxidation resistance, as a good moisture barrier for high-temperature industrial as well as strategic applications. Their properties are low electrical conductivity, high hardness, a low friction coefficient, high photosensitivity in the UV region, and good field emission characteristics. All these characteristics have led to a rapid increase in research activities on the synthesis of SiCxNy compounds. In addition to these properties, low density and good thermal shock resistance are very important requirements for future aerospace and automobile parts applications to enhance the performance of the components. SiCxNy is also an important material in microand nano-electronics and sensor technologies due to its excellent mechanical and electrical properties. The material possesses good optical transmittance properties. This is very useful for membrane applications, where the support of such films is required (Fainer et al., 2007, 2008; Mishra, 2009; Wrobel, et al., 2007, 2010; Kroke et al., 2000). The structural similarity between the allotropic forms of carbon and boron nitride (hexagonal BN and graphite, cubic BN and diamond), and the fact that B-N pairs are isoelectronic to C-C pairs, was the basis for predictions of the existence of ternary BCxNy compounds with notable properties (Samsonov et al., 1962; Liu et al., 1989; Lambrecht & Segall, 1993; Zhang et al., 2004). This prediction has stimulated intensive research in the last 40 years towards the synthesis of ternary boron carbonitride. BCxNy compounds are interesting in both the cubic (c-BCN) and hexagonal (h-BCN) structure. On the one hand, the