Abstract
Using molecular-dynamics simulation, we study the sputtering of a Pt(1 1 1) surface under oblique and glancing incidence 5 keV Ar ions. For incidence angles larger than a critical angle ϑ c , the projectile is reflected off the surface and the sputter yield is zero. We discuss the azimuth dependence of the critical angle ϑ c with the help of the surface corrugation felt by the impinging ion. If a step exists on the surface, sputtering occurs also for glancing incidence ϑ > ϑ c . We demonstrate that for realistic step densities, the total sputtering of a stepped surface may be sizable even at glancing incidence.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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