Abstract
An atomic force microscope (AFM) system is used for large-area measurement with a spiral scanning strategy, which is composed of an air slide, an air spindle and a probe unit. The motion error which is brought from the air slide and the air spindle will increase with the increasing of the measurement area. Then the measurement accuracy will decrease. In order to achieve a high speed and high accuracy measurement, the probe scans along X-direction with constant height mode driven by the air slide, and at the same time, based on the change way of the motion error, it moves along Zdirection conducted by piezoactuator. According to the above method of error compensation, the profile measurement experiment of a micro-structured surface has been carried out. The experimental result shows that this method is effective for eliminating motion error, and it can achieve high speed and precision measurement of micro-structured surface.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
