Abstract
The nanopositioning stage with a piezoelectric driver usually compensates for the nonlinear outer-loop hysteresis characteristic of the piezoelectric effect using the Prandtl–Ishlinskii (PI) model under a single-ring linear voltage, but cannot accurately describe the characteristics of the inner-loop hysteresis under the reciprocating linear voltage. In order to improve the accuracy of the nanopositioning, this study designs a nanopositioning stage with a double-parallel guiding mechanism. On the basis of the classical PI model, the study firstly identifies the hysteresis rate tangent slope mark points, then segments and finally proposes a phenomenological model—the mark-segmented Prandtl–Ishlinskii (MSPI) model. The MSPI model, which is fitted together by each segment, can further improve the fitting accuracy of the outer-loop hysteresis nonlinearity, while describing the inner-loop hysteresis nonlinearity perfectly. The experimental results of the inverse model compensation control show that the MSPI model can achieve 99.6% reciprocating linear voltage inner-loop characteristic accuracy. Compared with the classical PI model, the 81.6% accuracy of the hysteresis loop outer loop is improved.
Highlights
The nanopositioning stage of the piezoelectric ceramic material driver has the advantages of small volume, high displacement resolution, fast response, large bearing capacity, no noise, and high stability [1]
The results show that the description accuracy of the mark-segmented Prandtl–Ishlinskii (MSPI) model is high, and it has good performance in both the compensation hysteresis inner loop and hysteresis outer loop
The modeling results show that the classical PI model describes the hysteresis characteristics well under single-ring linear voltage, but the accuracy under the reciprocating linear voltage is comparatively poor
Summary
The nanopositioning stage of the piezoelectric ceramic material driver has the advantages of small volume, high displacement resolution, fast response, large bearing capacity, no noise, and high stability [1]. In a previous study [24], a segmented model was carried out by dividing the boost phase hysteresis characteristics by polarization in single-ring linear voltage. It is more likely for an improved method to solve the physical problem than a define-based modeling. Aiming at the complex hysteresis problem of the piezoelectric stage for the reciprocating linear voltage, this study proposes a mark-segmented PI (MSPI) model that loads the reciprocating linear voltage signal according to the reciprocating linear displacement requirement and compensates using the characteristics of the obtained hysteresis.
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