Abstract
We present a long-term bias drift compensation algorithm for high quality factor (Q-factor) MEMS rate gyroscopes using real-time temperature self-sensing. This approach takes advantage of linear temperature dependence of the drive-mode resonant frequency for self-compensation of temperature-induced output drifts. The approach was validated using a vacuum packaged silicon Quadruple Mass Gyroscope (QMG), with signal-to-noise ratio (SNR) enhanced by isotopic Q-factors of 1.2 million. Owing to the high Q-factors, measured frequency resolution of 0.01ppm provided a temperature self-sensing precision of 0.0004°C, on par with the state-of-the-art MEMS resonant thermometers. The real-time self-compensation yielded a total bias error of 2°/h and a scale-factor error of 700ppm over temperature range of 25–55°C. The presented approach enabled repeatable long-term rate measurements required for MEMS gyrocompassing applications with a milliradian azimuth precision.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
