Abstract
The article deals with the analysis of gas flows in pumped canals in differential pumped chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares and verifies existing results of differentially pumped chamber flow simulation from ANSYS Fluent system, which uses the mechanics of continuum, with the ones published by D. Danilatos using the Monte Carlo method.
Highlights
The article analyses the gas flow within the differentially pumped chamber, which is a part of the Environmental Scanning Electron Microscope (ESEM) [1]
The comparison of simulation results from the Monte Carlo method with the results obtained using the ANSYS Fluent shows that both methods have had similar results
Danilatos, who used the Monte Carlo method, are practically identical to the results obtained by ANSYS Fluent, which uses the finite volume method and the continuum mechanics assumption
Summary
The article analyses the gas flow within the differentially pumped chamber, which is a part of the Environmental Scanning Electron Microscope (ESEM) [1]. The Monte Carlo method is based on running numerous random experiments with the model of the system where their evaluation shows the possibility of specific effect In this manuscript, there are compared the results obtained by applying the Monte Carlo method with the results obtained by applying the method which uses the mechanics of the continuum used for calculations of the simulations by the ANSYS Fluent program [4]. The topic of this work is the comparison of two methods mentioned above and their results for the purpose of deciding which one is more accurate and It could be used for further simulation calculations for the purpose of additional improvements in design of the ESEM type microscope [5]
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