Abstract

We compare designs and laser-induced damage thresholds (LIDTs) of hafnia/silica antireflection (AR) coatings for 1054 nm or dual 527 nm/1054 nm wavelengths and 0° to 45° angles of incidence (AOIs). For a 527 nm/1054 nm, 0° AOI AR coating, LIDTs from three runs arbitrarily selected over three years are ∼20 J/cm2 or higher at 1054 nm and <10 J/cm2 at 527 nm. Calculated optical electric field intensities within the coating show two intensity peaks for 527 nm but not for 1054 nm, correlating with the lower (higher) LIDTs at 527 nm (1054 nm). For 1054 nm AR coatings at 45° and 32° AOIs and S and P polarizations (Spol and Ppol), LIDTs are high for Spol (>35 J/cm2) but not as high for Ppol (>30 J/cm2 at 32° AOI; ∼15 J/cm2 at 45° AOI). Field intensities show that Ppol discontinuities at media interfaces correlate with the lower Ppol LIDTs at these AOIs. For Side 1 and Side 2 dual 527 nm/1054 nm AR coatings of a diagnostic beam splitter at 22.5° AOI, Spol and Ppol LIDTs (>10 J/cm2 at 527 nm; >35 J/cm2 at 1054 nm) are consistent with Spol and Ppol intensity behaviors.

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