Abstract
A detailed comparison of various characteristics obtained in an electron transport calculation by Monte Carlo methods with experimental data is given. Some restrictions on the use of the condensed random-walk scheme and the continuous slowing-down approximation are demonstrated. The individual collision scheme proposed provides the best agreement with the experiments for electron energies E 0 less than 50 keV.
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More From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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