Abstract
Abstract In this paper we discuss some new theoretical results which we reached in the analysis of a random surface roughness in the framework of the two-dimensional (2D) Fresnel approximation. A comparison with 2D Fraunhofer approximation results is made. It is shown for experimentally reasonable values of the geometrical arrangement parameters of the method that the surface roughness measurement can be interpreted in the 2D Fraunhofer approximation only for surfaces with high slopes of surface irregularities. Surfaces with small slopes of irregularities require interpretation of the surface roughness measurement in the 2D Fresnel approximation. In this case, not only the standard deviation of surface height fluctuations but also the correlation length of the surface can be determined.
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