Abstract
Accurate calculation of Casimir forces is essential for the development of micro- and nanoelectromechanical systems. Silicon carbide (SiC) is an excellent material for fabricating microsensors due to its high durability, high stiffness, and low thermal expansion. The permittivity of the SiC could be characterized by the Lorentz model or the Palik data. However, the influence of the two models of calculating permittivity on the Casimir force has not been discussed. In this work, we calculate the Casimir force between SiC plates by the Lorentz model and the Palik data, respectively. The Casimir force calculated by the Lorentz model could be 4 times greater than the Palik data for SiC at a gap distance of 10 nm. The difference of the permittivity in the ultraviolet lead to different Casimir forces. This work demonstrates the difference between the two models of permittivity for calculating the SiC-based Casimir force, and provides a reliable base for more accurate Casimir force calculations.
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