Comparison of Surface Roughness Attainable in High Speed End Milling of Silicon with Air Blowing on Conventional and CNC Milling Machines

Abstract

Review of past research indicated that ductile mode machining of silicon can produce surface roughness values as low as 0.22 µm, which is about half of 0.40 µm, the usual standard roughness value to avoid fine grinding and rough polishing operations. The current research investigated and compared the surface roughness and integrity attained in high speed end milling of silicon (using diamond coated tools) under ductile mode machining conditions. Two different types of end milling machines were utilized, CNC and conventional milling machines. Additionally, the effect of compressed air on the resultant surface roughness was investigated. The air blowing fixture, designed for mounting the compressed air hose, consisted of fixed and movable jaws, air blower clamp, fasteners, and the air gun. Air blowing was used to prevent silicon chips from settling on the machined surface, since it was observed to be an acute problem in high speed ductile mode machining of silicon. The three machining parameters: spindle speed, depth of cut, and feed rate were varied within the ranges 60,000 to 80,000 rpm, 10 to 20 µm, and 5 to 15 mm/min respectively. The resultant machined surfaces were analysed using Wyko NT 1100 and SurfTest SV-500 profilometers in order to measure the attaine surface roughnesses and surface profile. The machined surfaces had almost no deposition and was of excellent finish.