Abstract
In this work, silicon coatings were deposited using VPS and APS technologies. Their structure and composition were characterized using XPS, SEM, and XRD. The porosity and surface-roughness of coatings were evaluated. The results showed that the VPS silicon coating possessed lower porosity compared with the APS silicon coating. The APS silicon coating surface was almost all covered by many small particles whose size is about 100 nm. The Si 2p XPS spectra indicated that silicon oxide existed in both coatings. The oxidation may have occurred during the plasma spray process. However, the VPS process could inhibit silicon from being oxidated.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
