Abstract
The fluorination of the polymer polyethylene terephthalate in plasma created from SF6 or CF4 gas at various pressures was investigated. The surface was analysed by X-ray photoelectron spectroscopy and water contact angle measurements, whereas the plasma was characterized by optical emission spectroscopy. The extent of the polymer surface fluorination was dependent on the pressure. Up to a threshold pressure, the amount of fluorine on the polymer surface and the surface hydrophobicity were similar, which was explained by the full dissociation of the SF6 and CF4 gases, leading to high concentrations of fluorine radicals in the plasma and thus causing the saturation of the polymer surface with fluorine functional groups. Above the threshold pressure, the amount of fluorine on the polymer surface significantly decreased, whereas the oxygen concentration increased, leading to the formation of the hydrophilic surface. This effect, which was more pronounced for the SF6 plasma, was explained by the electronegativity of both gases.
Highlights
Fluorine-containing plasmas are often used for the surface hydrophobization of polymer materials [1,2,3,4,5,6,7,8] and for dry-etching in the semiconducting industry [9,10,11,12]
We investigated and compared the SF6 and CF4 plasma created at various pressures on the surface modification of polyethylene terephthalate (PET) polymer films
Infilm the first had onlyconcentration some CF groups and anto insignificant number of CF2 functional in the surface region below the threshold pressure, there was no significant difference in the fluorine concentration probed by the photoelectrons
Summary
Fluorine-containing plasmas are often used for the surface hydrophobization of polymer materials [1,2,3,4,5,6,7,8] and for dry-etching in the semiconducting industry [9,10,11,12]. Treated in SF6 plasma; few authors observed sulphur because of grafting of SFx species on the treated surface, whichthe were veryangle sensitive to change ablation stable as well, because contact did not in [8,17]. The authors studied fluorine content of 44 at % was found at the open end, and only 3 at % was found at the close end of the adhesion of fibroblast cells and found that the number of cells decreased from the hydrophobic the mask. Oxygen plasma treatment time was varied, whereas the treatment time in the SF plasma hydrophobic surface at the open end to the hydrophilic surface at the closed end. We investigated and compared the SF6 and CF4 plasma created at various pressures on the surface modification of PET polymer films
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