Abstract
A planar probe and an optical spectrometer were employed to analyze some parameters in an inductively coupled plasma (ICP). The analyses were performed in Ar, Ar+SF6 and O2 plasmas at 40 mTorr. Typical probe results indicate an ion current of 10-3 A/cm2 and an electron temperature (high energy tail) between 1-2 eV in measurements at high powers. At low powers a distinct discharge regime is observed, typically with low density (low ion current) and high electron temperature. Even though a quantitative analysis has not been done yet, the optical emission studies also showed the presence of these two regimes.
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