Abstract

High-velocity/high-dynamic operation is the basic requirement of the permanent magnet linear synchronous motor (PMLSM)-driven application especially in semiconductor equipment. Predictive current control (PCC) can make sure superior current/thrust response. However, large inductance mismatch between the controller and the real plant will deteriorate the current performance significantly. This paper presents two different adaptive disturbance observer (ADO) design method to improve the inductance robustness of the PCC for the PMLSM. Firstly, the traditional constant-gain ADO based on the internal model is introduced and its drawback of large current overshoot and oscillations is presented. Secondly, to improve the current performance, two different types of ADO methods with discrete form are designed. Finally, the simulation and experimental results are given to verify the effectiveness of the newly design method.

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