Abstract
Multilayer gratings are important optical elements for obtaining a high efficiency high resolution performance in the soft x-ray region. Though the Mo/Si multilayer poses a poor thermal stability, it is a preferred combination for multilayer coating near the Si L edge region (λ=124Å). As a substitute to Mo/Si, a structure comprised of compound material NbC was proposed recently which exhibits superior thermal stability with identical reflectivity performance. In the present study, an analytical solution for grating efficiency calculation presented in Ref 2 by Kozhevnikov et al. is used to calculate theoretical performance of lamellar multilayer grating (LMG) comprised of Mo/Si and NbC/Si structure. Simulation results suggest that the performance of lamellar grating comprised of NbC/Si multilayer is identical with that obtained using Mo/Si multilayer grating.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
