Abstract
For the ferroelectric gate-type capacitors, we have fabricated Pt/YMnO3(YMO)/Si and Pt/SrBi2Ta2O9(SBT)/Si structures. We have used the highly c-axis oriented hexagonal YMO thin films (εr≈19) and the polycrystalline SBT thin films (εr≈150) with a dominant (115) orientation, respectively. The memory effect resulting from the ferroelectric switching properties is investigated as a function of the dielectric constant of ferroelectric thin films with 150 nm in thickness. About 3 times wider memory window is obtained by using a relatively low dielectric constant of YMO than that using a relatively high dielectric constant of SBT. Typical memory windows of the Pt/YMO/Si and the Pt/SBT/Si capacitors are 1.24 and 0.34 V, respectively, at a gate voltage of 5 V.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.