Abstract
This paper reports experimental results of a comparative study for mechanical and tribological properties of permalloy (NiFe) and magnetically soft high moment FeTaN sputtered thin films. It was observed that the hardness, elastic modulus and wear resistance of FeTaN films are all superior to those of NiFe permalloy films. AFM observations on unworn films and worn surfaces of a wear scar revealed that pit formation may contribute to wear damage mechanisms for low load abrasive wear.
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