Abstract
This paper discusses the suitability of lateral and vertical switches for use as micorelays. These two types of switch are fabricated and tested and the advantages and disadvantages are outlined. The lateral motion switch consists of a single-crystalline silicon cantilever beam, which is made by a deep silicon etching process. Therefore the switch provides a high stiffness in the vertical axis, a high degree of design flexibility and a stress free structure, which is a main advantage of this type. The vertical motion switch is a multi-layer cantilever beam, which is distinguished by high isolation resistances and metallic contacts. Both types are candidates for microrelays; however the vertical switch seems more suited.
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