Comparison of generalized differential quadrature and Galerkin methods for the analysis of micro-electro-mechanical coupled systems

Abstract

This paper presents a comprehensive comparison study between the generalized differential quadrature (GDQ) and the well-known global Galerkin method for analysis of pull-in behavior of nonlinear micro-electro-mechanical coupled systems. The nonlinear governing integro-differential equation for double clamped MEMS devices which was derived using variational principle by the authors [Sadeghian H, Rezazadeh G, Osterberg PM. Application of the generalized differential quadrature method to the study of pull-in phenomena of MEMS switches. J Microelectromech Syst 2007;16(6):1334–40] is discretized by applying Galerkin and GDQ methods. The divergence instability or pull-in phenomenon is analyzed. Obtained results are compared with the results of the pervious works. The Galerkin method is implemented with effect of number of used shape functions. Different types of trail functions on calculated pull-in voltage are examined. Furthermore, compare to one term and two terms truncation Galerkin method, it is observed that the GDQ with small number of grid points (non-uniform) performs accurate results for nonlinear micro-electro-mechanical coupled behavior which requires a large number of grid points at high-order approximation.