Abstract

For nearly fifteen years k-factor measurements have been made by varying the composition of the standards at fixed accelerating voltage and measuring the change in the experimental k-factor with atomic number. From this data a “best model” of the ionization cross-section is frequently proposed for use in quantitative analysis, however it is valid only at that fixed voltage. Few if any studies seek to determine the systematic variation in the k-factor with accelerating voltage. In this paper experimental measurements of the variation in the k-factor as a function of accelerating voltage are reported. With the advent of medium voltage analytical microscopes routinely available to the microscopy community, it becomes essential to understand how the k-factor varies with accelerating voltage in order that errors in quantitative analysis can be avoided should experimental or theoretical k-factors from lower voltage instruments are applied to the medium voltage regime.Electropolished specimens of β-NiAl were studied in a Philips CM30T electron microscope, equipped with a Be-Window Si(Li) detector interfaced to an EDAX 9900 Energy Dispersive Analysis System.

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