Abstract

Optical measurements on semiconductor thin films can be used to derive their complex dielectric function. In a log-log graph, the imaginary part near the plasma frequency tends to have two linear segments, one slope denoting the Drude and the other the quantum region. The quantum region is represented by a von Baltz and Escher asymptotic expression. An empirical screening function for the charged impurities is derived by matching the Drude and quantum expressions at the relatively narrow transition frequency band between Drude and quantum regions. This empirical expression and the corresponding theoretical Thomas-Fermi screening function are applied to a series of In 2O 3 and CdIn 2O 4 films to show that the theory systematically underestimates the screening by a factor of 2–3.

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