Abstract
Abstract SnO 2 chemical sensors were fabricated by two different methods. The first one was based on contacting individual nanowires by in situ nanofabrication in a Focused Ion Beam (FIB) microscope. The second one, the traditional sol-gel method, was based on tin dioxide nanopowder thermal agglomeration. Both types of sensors were capable of detecting air-diluted NH3 to the parts per million level. The responses to this gas were studied at different concentrations and operating temperatures, showing up reproducible characteristics. Their performances were discussed in relation to the accepted mechanisms for NH 3 sensing in n-type metal oxides. Investigations were made on device stability, demonstrating that these nanowires have some advantages in comparison with sol-gel sensors.
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