Abstract
Co/Pd multilayered films with perpendicular magnetic anisotropy were patterned using block copolymer templating. Two methods of achieving phase separation of the block copolymer were compared. A matrix study of etch time and etch angle was carried out for each phase separation method, and their effects on the magnetic properties were studied. It was found that ion milling at 45° and 3.5 minutes for the heptane annealing method yielded the highest coercivity, 3.2 kOe, a 246% increase over that of an unpatterned film.
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Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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