Abstract
A comparison, of the optically excited vibrations, including self-oscillations, of cantilever and bridge silicon microresonators is presented. The theoretical analysis and experimental investigations show that not only has the cantilever microresonator a greater vibration amplitude than the bridge structure, but also its resonance frequency is independent of the strain induced by boron doping and the deformation of the silicon wafer caused by assembly. These advantages could be of great value in achieving practical all-fibre optically addressed silicon microresonator sensors, which are used to measure physical parameters except for force or pressure, such as small masses, chemical components, vibration, temperature, etc.
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