Abstract
A comparison between the performance of conductometric and layeredsurface acoustic wave (SAW) hydrogen sensors is presented. Bothsensor structures employ an RF magnetron sputtered tungsten trioxide(WO3) thin film as a selectivelayer for hydrogen (H2) sensing applications. The conductometric device is based on an aluminasubstrate, while the layered SAW device structure is fabricated on a36° Y-cut,X-propagating LiTaO3 substrate with a zinc oxide (ZnO) guiding layer. The sensors wereinvestigated for different operational temperatures and concentrations ofH2 ranging between 0.06 and 1% in synthetic air. Approximately1.4 µA current and 27 kHz frequency shifts were observed towards 1%H2 in air for the conductometric and layer SAW device, respectively.
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