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Abstract
This paper presents a theoretical analysis and experimental study on the resonant network of the power conditioning system (PCS) for a plasma generator. In order to consider the characteristics of the plasma load, the resonant network of the DC-AC inverter is designed and analyzed. Specifically, the design of an LCL resonant network and an LCCL resonant network, which can satisfy the output current specification in consideration of plasma characteristics, is explained in detail. Moreover, the inverter current and phase angle between the inverter voltage and current is derived for evaluating inverter performance. Based on these analysis results, the DC-AC inverter can be designed for a plasma generator considering plasma load characteristics. The theoretical analysis of both networks is validated through the simulation and experimental results.
Highlights
Plasma generators are used in various industrial fields for display panels and in the wafer cleaning process of semiconductors
These plasma generators are conventionally constructed as a power conditioning system (PCS) and a chamber for plasma generation
In order to effectively generate the electric field, the PCS should supply high switching frequency and low total harmonic distortion (THD) constant current [3,4]. Another characteristic of the PCS for a plasma generator is that the inverter of the PCS using zero voltage switching (ZVS) is conventionally adopted to decrease the switching losses
Summary
Plasma generators are used in various industrial fields for display panels and in the wafer cleaning process of semiconductors. In order to effectively generate the electric field, the PCS should supply high switching frequency and low total harmonic distortion (THD) constant current [3,4]. Another characteristic of the PCS for a plasma generator is that the inverter of the PCS using zero voltage switching (ZVS) is conventionally adopted to decrease the switching losses. In order to design a resonant network that is suitable for a plasma generator, the characteristics of the LCL network and the LCCL network should be compared to select the optimal maximum inductor current and phase angle. The experimental results based on a 1 kW plasma generator are presented to verify the performances of the LCCL and LCL resonant networks on the plasma generator
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